发明名称 SUBSTRATE HAVING RUGGED STRUCTURE OBTAINED FROM HYDROPHOBIC SOL/GEL MATERIAL
摘要 There are provided a fine concave-convex structure substrate which is hydrophobic and excellent in heat resistance, a solution used for producing the concave-convex structure substrate, and a method for producing the concave-convex structure substrate. The concave-convex structure substrate having the concave-convex structure includes a concave-convex structure layer made of a sol-gel material, and a contact angle of water on the sol-gel material in a flat and smooth film shape is not less than 80°. The concave-convex structure substrate according to the present invention has a hydrophobic surface, and thus, in the element in which the concave-convex structure substrate is incorporated, moisture adsorption onto the surface of the concave-convex structure substrate can be prevented, thereby making it possible to lengthen a service life of the element.
申请公布号 US2016028031(A1) 申请公布日期 2016.01.28
申请号 US201514876539 申请日期 2015.10.06
申请人 JX NIPPON OIL & ENERGY CORPORATION 发明人 NAKAYAMA Keisuke;TAKAHASHI Madoka;SEKI Takashi
分类号 H01L51/00;H01L51/52;C09D183/04;H01L51/56 主分类号 H01L51/00
代理机构 代理人
主权项 1. A concave-convex structure substrate, comprising: a substrate; and a concave-convex structure layer made of a sol-gel material and formed on the substrate, wherein a contact angle of water on the sol-gel material in a flat and smooth film shape is not less than 80°.
地址 Tokyo JP