| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus for a glass substrate. <P>SOLUTION: In a heat treatment apparatus which heats a workpiece with a heater disposed in a furnace body, the heater is formed by housing a heater body composed of a heating element in a case like hollow heating plate made of a metal, and metal tension means having a thermal expansion coefficient smaller than that of the heating plate is disposed between both ends of the heating plate and thereby applying tension to the heating plate. Further, in the heat treatment apparatus which heats the workpiece with the heater disposed in the furnace body, the heater is formed by housing the heater body composed of the heating element in the case like hollow heating plate made of the metal and a standing wall of a reinforcement material penetrates through the heating plate. One side end part of the reinforcement material is fixed to a furnace body frame, and a heat expansion absorption mechanism capable of absorbing heat expansion is provided at the other side end part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
