| 主权项 |
1. A surface treatment apparatus, comprising:
an enclosure constituting a circumferential wall; a sample-holding plate provided inside the enclosure, for holding a sample; a material fluid supply channel provided to the enclosure, for supplying a material fluid to the sample on the sample-holding plate; and a fluid discharge channel provided on a lateral side of the sample-holding plate in the enclosure, for discharging to the outside the material fluid having applied surface treatment to the sample while flowing along a surface of the sample, as a used fluid, via an outlet formed on the lateral side of the sample-holding plate, wherein when
a directional axis perpendicular to a cross section of the outlet is defined as an x axis,a desired directional axis orthogonal to the x axis is defined as a y axis,a position of one of points where a circumferential end of the outlet intersects the y axis is defined as a focus position and also as a +a position of the y axis,a position of the other of the points where the circumferential end of the outlet intersects the y axis, being symmetrically opposite to the focus position relative to the x axis, is defined as a reference position and also as a zero position of the y axis,a reference line is defined in a −a position of the y axis, which is a position symmetrical to the focus position with the reference position in-between,a point where a desired normal line in parallel to the y axis intersects the reference line is defined as a normal line upper end point, anda point where the desired normal line intersects a desired line extending from the focus position is defined as a normal line lower end point,the fluid discharge channel includesa channel one-side curved line that is a parabola curved line that passes the reference position, wherein the parabola curved line is obtained as a trajectory of the normal line lower end point such that a length of the desired normal line between the normal line upper end point and the normal line lower end point is equal to a length of the desired line between the focus position and the normal line lower end point, or a parabola analogous curved line formed with the parabola curved line as a basic curved line, anda channel other-side curved line opposite to the channel one-side curved line, and a shape of the fluid discharge channel is formed based on the channel one-side curved line and the channel other-side curved line. |
