申请人 |
MARUBUN CORPORATION;TOSHIBA KIKAI KABUSHIKI KAISHA;RIKEN;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;ULVAC, INC.;TOKYO OHKA KOGYO CO., LTD. |
发明人 |
KASHIMA, YUKIO;MATSUURA, ERIKO;KOKUBO, MITSUNORI;TASHIRO, TAKAHARU;OOKAWA, TAKAFUMI;HIRAYAMA, HIDEKI;YOUN, SUNG WON;TAKAGI, HIDEKI;KAMIMURA, RYUICHIRO;OSADA, YAMATO;SHIMATANI, SATOSHI |