摘要 |
PROBLEM TO BE SOLVED: To provide a suspension substrate having a circuit capable of improving connection reliability to an electronic element.SOLUTION: A suspension substrate 1 having a circuit includes: a metal support substrate 8; a base insulator layer 9 formed on the metal support substrate 8; a conductor layer 10; and a cover insulator layer 11 formed on the base insulator layer 9 and covering the conductor layer 10. The base insulator layer 9 includes a terminal opening part 49 penetrating the base insulator layer 9 in thickness direction. The conductor layer 10 includes: wiring 35 formed on the base insulator layer 9; a piezo terminal 34 electrically connected to the wiring 35 and exposed from the terminal opening part 49 and electrically connectable to a piezoelectric element 5; and further, a protective layer 50 protecting the piezo terminal 34 exposed from the terminal opening part 49. |