| 摘要 |
PROBLEM TO BE SOLVED: To provide a film deposition device and a film deposition method capable of depositing precisely a film on a deposition object.SOLUTION: Before abutment of a thermal deposition head 24 on the surface of a film 12 to be thermally deposited onto a flange part 13 of a container 11, the position of the surface of the film 12 is regulated by moving a rotary roller 26 in an arrow 31 direction along the surface of the flange part 13. |
