发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method and a semiconductor device, which increase electrostatic capacitance and inhibit deterioration in breakdown voltage.SOLUTION: A semiconductor device manufacturing method comprises: a process of forming a lower layer electrode on a substrate; a process of covering a circumference of the lower layer electrode and a top face end of the lower layer electrode to form a first insulation film; a process of forming a second insulation film along a top face central part of the lower layer electrode except the top face end and lateral faces and a top face of the first insulation film; and a process of forming an upper layer electrode on the second insulation film.
申请公布号 JP2016009845(A) 申请公布日期 2016.01.18
申请号 JP20140131752 申请日期 2014.06.26
申请人 LAPIS SEMICONDUCTOR CO LTD 发明人 NARUSAWA TAKUO
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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