| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a Fabry-Perot interferometer having air layers, capable of preventing stress from locally concentrating at a high refractive index layer forming movable mirrors, while adopting multiply segmented fixed mirrors.SOLUTION: At an intermediate sacrificial layer formation process, a first sacrificial layer 40 is formed on a second high refractive index layer 31. Next, a second sacrificial layer 41 is formed on the first sacrificial layer 40 using material different from the first sacrificial layer 40, and the planarization of the second sacrificial layer 41 is performed by the heating. Then, a third sacrificial layer is formed on the second sacrificial layer 41 having been planarized, using the same material as the first sacrificial layer 40, thus forming an intermediate sacrificial layer including the first sacrificial layer 40, the second sacrificial layer 41, and the third sacrificial layer. The first sacrificial layer 40 and the third sacrificial layer are formed using material of which fluidity when heated is lower than the second sacrificial layer 41. At the planarization process, among the first sacrificial layer 40 and the second sacrificial layer 41, only the second sacrificial layer 41 is made to flow. |
