Micromechanical Digital Loudspeaker

摘要

A digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.

主权项

1. A method for manufacturing a digital loudspeaker, comprising:
applying a first stator material on a first main surface of a base structure; applying a sacrificial material with a first sacrificial material thickness t1 on a first main surface of the stator material opposite the first main surface of the base structure; applying a membrane material on a first main surface of the sacrificial material opposite the first main surface of the stator material; applying a further sacrificial material with a second sacrificial material thickness t2 on a first surface of the membrane material opposite the first main surface of the sacrificial material; removing the sacrificial material and the further sacrificial material in a sound transducing region of the digital speaker; wherein the first sacrificial material thickness t1 and the second sacrificial material thickness t2 allow the membrane material, when being electrostatically deflected, to mechanically contact the first stator material or the second stator material after removal of the sacrificial material.