ELECTROSTATIC FORCE BASED ACTUATOR INCLUDING POLY-IMIDE ORGANIC DIELECTRIC LAYER

摘要

The present invention relates to an electrostatic force based actuator including a polyimide organic dielectric layer, which comprises: a pair of electrodes which face each other; a polyimide insulation layer disposed between the electrodes; and an adhesive member disposed between any one of the electrodes and the polyimide insulation layer. According to the present invention, voltage is applied to the electrodes, so the attraction is applied between the electrodes by the polarization in the polyimide insulation layer, thereby being mechanically deformed. According to the electrostatic force based actuator including the polyimide organic dielectric layer, the electrostatic force based actuator includes an organic insulation layer which includes polyimide between the electrodes facing each other, predetermined voltage is applied to the electrodes, and the polarization in the polyimide organic insulation layer increases according to the increase of the voltage, so the attraction between the electrodes increases, thereby improving characteristics of mechanical deformation of the electrostatic force based actuator.