发明名称 Gas sensor
摘要 Volatile organic compounds or oxidizing gases are detected when the work function of a metal-organic framework is measured to produce a sensor signal.
申请公布号 US9234871(B2) 申请公布日期 2016.01.12
申请号 US201213464604 申请日期 2012.05.04
申请人 Siemens Aktiengesellschaft 发明人 Fleischer Maximilian;Pohle Roland;Wiesner Kerstin;Von Sicard Oliver
分类号 G01N27/00;H01L27/28;H01L51/00;G01N27/414 主分类号 G01N27/00
代理机构 Staas & Halsey LLP 代理人 Staas & Halsey LLP
主权项 1. An apparatus for measuring at least one of a volatile organic compound and an oxidizing gas, comprising: a measuring material, at least a portion being selected from the group consisting of metal-organic frameworks, having an electronic work function changed on interaction with the at least one of the volatile organic compound and the oxidizing gas; and a field effect transistor measuring structure, including a drain and a source covered by a passivation layer, measuring changes in the electronic work function of the measuring material, wherein the measuring material is provided in a region of a gate of the field effect transistor measuring structure and the measuring material includes a C9H3FeO6 metal-organic framework.
地址 Munich DE