发明名称 RESIST STRIPPER COMPOSITION AND METHOD OF STRIPPING RESIST USING THE SAME
摘要 The present invention relates to a resist stripper composition, and to a method for stripping a resist using the same and, more specifically, to a resist stripper composition which comprises: 40-55 wt% of a propionamide compound; 35-55 wt% of primary alcohol; and 0.1-20 wt% of alkanolamine having 1-10 carbon atoms. Thus, the composition exhibits excellent solvency for the resist, eco-friendliness, and high economicality, and uses alkanolamine and primary alcohol which has a high boiling point, thereby showing a high yield in accordance with remarkable increase in solvency and stripping ability. The present invention further relates to a method for stripping the resist using the same.
申请公布号 KR20150146285(A) 申请公布日期 2015.12.31
申请号 KR20140076657 申请日期 2014.06.23
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 LEE, YU JIN;KIM, SUNG SIK;PANG, SOON HONG
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
主权项
地址