SUBSTRATE TRANSPORTING APPARATUS AND METHOD OF OPERATING THE SAME

摘要

Provided are a substrate transporting apparatus and a method for operating the same. The substrate transporting apparatus comprises: a first light emitting sensor emitting a first sensing light in a first direction; a first light receiving sensor receiving the first sensing light; a second light emitting sensor emitting a second sensing light in a second direction different than the first direction; a second light receiving sensor receiving the second sensing light; a substrate transporting loader passing through traveling lines of the first sensing light or the second sensing light; a state information storage unit storing state information of the substrate transporting loader; and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.