| 摘要 |
A neutral density filter having multiple film layers, a manufacturing device thereof and a manufacturing method therefor. The neutral density filter comprises a substrate (1000) plated with a plurality of film layers, the film layers comprise antireflection films and metal films that are laminated, and the refractive index of the materials forming the antireflection films is higher than 1.3. The manufacturing device of the neutral density filter having multiple film layers comprises a vacuum chamber (10), a film plating umbrella (11) and a power source (12). The film plating umbrella (11) is fixed to the top of the cavity of the vacuum chamber (10), a rotary shaft of the film plating umbrella (11) is connected to the power source (12), and the bottom of the cavity of the vacuum chamber (10) is provided with two film plating material sources (14, 15) that are located below the film plating umbrella (11). A correction plate (13) is fixed in the vacuum chamber (10), and one end of the correction plate (13) is located on the same side of the two film plating material sources (14, 15). The manufacturing method for the neutral density filter having multiple film layers comprises the steps of: (1) placing a substrate in the vacuum chamber (10), pumping the vacuum chamber (10) to a preset vacuum degree, and fixing the correction plate (13) in the vacuum chamber (10); and (2) driving the film plating umbrella (11) to rotate by using the power source (12), wherein the two film plating material sources (14, 15) are used for evaporation of the film layers in an alternating mode, and the film layers are sequentially laminated according to the preset optical thickness and a preset order. |
