| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technique with which, when inspecting a photo device by irradiating the photo device with pulse light, a light intensity of the pulse light can be set appropriately. <P>SOLUTION: An inspection method is provided for inspecting a photo device. The inspection method includes the steps of: (a) detecting an electric field strength of an electromagnetic wave generated from the photo device through a detector by irradiating a photo-detection plane of the photo device with pulse light emitted from a femto-second laser while changing a light intensity of the pulse light; (b) acquiring a maximum light intensity of the pulse light at the time when the electric field strength of the electromagnetic wave detected in the step (a) becomes maximum; and (c) detecting the electric field strength of the electromagnetic wave pulse generated in the photo device through the detector by irradiating the photo device with pulse light of which the light intensity is determined based on the maximum light intensity which has been acquired in the step (b). <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
