| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic wave device capable of suppressing collapse of a three-dimensional crossover, while suppressing parasitic capacity.SOLUTION: An acoustic wave device includes a piezoelectric substrate 10, an IDT14 provided on the piezoelectric substrate 10 and exciting acoustic waves, a signal wiring 22 provided on the piezoelectric substrate 10 in connection with the IDT14, a ground wiring 24 provided on the piezoelectric substrate 10 in connection with the IDT14, while straddling the signal wiring 22 in three-dimensional crossover, and an insulator 36 provided partially in a direction parallel with the upper surface of the piezoelectric substrate 10 below the ground wiring 24 at the three-dimensional crossover, so as to form a hollow space 40 below the ground wiring 24 at the three-dimensional crossover 34 of the signal wiring 22 and ground wiring 24. |
