| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer method which allows for appropriate suction of a workpiece by a chuck table, without making a processing device expensive.SOLUTION: A transfer method includes a mounting step for mounting a workpiece (11) in a state where the outer periphery (11c) is warped upward compared with the central part (11b) on a temporary placement table (12), a suction pad lowering step for lowering the suction pad (14b) of transfer means (14) toward the workpiece, and bringing the outer periphery of the workpiece entirely into tight contact with the suction pad, a suction step for sucking the workpiece by means of the suction pad, after performing the suction pad lowering step, and correcting the workpiece flatly along the suction surface of the suction pad, and a workpiece transfer step for transferring the workpiece sucked to the suction pad by transfer means and mounting on a chuck table (18), and in a state where the workpiece is in tight contact with the holding surface (18c) of the chuck table, sucking the workpiece by the chuck table and stopping suction of the workpiece by the suction pad of the transfer means. |
