METHOD FOR CONTACTLESS MEASUREMENT OF SURFACE ROUGHNESS PARAMETRES

摘要

FIELD: physics. ^ SUBSTANCE: maximum dimension L of a spot on the measured surface is given. A beam of probe radiation is directed on the spot. The spot is formed and characteristics of the reflected radiation are measured, from which the mean-square value of roughness Rq is determined. Also dimension x of the spot on the measured surface ranging from 0 to L is measured. Dependence function Rq(x) and its derivative Rq'x(x) are determined. Arithmetic average surface roughness Ra is determined using formula: ^ EFFECT: wider functional capabilities due to simultaneous contactless measurement of roughness parametres Rq and Ra. ^ 1 dwg