| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer thin film capacitor wherein the reliability of connection is not lowered even when the number of layers is increased, and to provide its manufacturing method. SOLUTION: In the multilayer thin film capacitor 10, a plurality of electrodes 12A belonging to one group, dielectric layers 13 and electrodes 12B belonging to the other group are alternately laminated on a substrate 11. On one end side of an opposite region, a first connection part for which the plurality of electrodes belonging to one group are piled up with each other is provided. Also, on the other end side of the opposite region, a second connection part for which the plurality of electrodes belonging to the other group are piled up with each other is provided. Only on the first connection part and the second connection part, a thickness adjusting conductor layer for alleviating a level difference from the opposite region is each piled up. Thus, the level difference between the connection parts and the opposite region is alleviated, and the number of lamination is increased without lowering the reliability of the connection. COPYRIGHT: (C)2009,JPO&INPIT
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