发明名称 LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD
摘要 A polarization conversion element capable of converting, with a limited light quantity loss, a linearly polarized incident light having a polarization direction in an almost single direction into a circumferentially polarized light having a polarization direction in an almost circumferential direction. A polarization conversion element (10) for converting the polarization state of an incident light into a specified polarization state. It is formed of an optical material having optical rotation, for example, quartz, and has a thickness distribution changing in a circumferential direction. The thickness distribution is so set that a linearly polarized light having a polarization direction in an almost single direction is converted into a circumferentially polarized light having a polarization direction in an almost circumferential direction. It has a plurality of circumferentially divided areas (10A-10D), and two arbitrary adjacent areas in the plurality of areas are different in thickness from each other. Also, two arbitrary facing areas in the plurality of areas have optical rotation angles almost equal to each other.
申请公布号 KR20100024490(A) 申请公布日期 2010.03.05
申请号 KR20107000897 申请日期 2005.01.14
申请人 NIKON CORPORATION 发明人 TANITSU OSAMU;SHIGEMATSU KOJI;HIROTA HIROYUKI;MATSUYAMA TOMOYUKI
分类号 G02B27/28;G02B5/30;G03F7/20;H01L21/027 主分类号 G02B27/28
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