PHYSICAL/BIOCHEMICAL SENSOR EMPLOYING AN ARRAY OF PIEZOELECTRIC MICRO-CANTILEVER RESONATORS OF SEVERAL SIZES, AND A PRODUCTION METHOD THEREFOR

摘要

The present invention discloses a physical/biochemical sensor employing an array of piezoelectric micro-cantilever resonators of several sizes which can perform simultaneous quantitative analysis of effects due to surface stress changes together with mass-dependent effects, and discloses a production method therefor. The physical/biochemical sensor employing piezoelectric micro-cantilever resonators comprises a configuration in which a plurality of piezoelectric micro-cantilever resonators of different sizes are arranged in such a way that the piezoelectric micro-cantilever resonators can perform quantitative analysis distinguishing between surface stress changes due to the adsorbed substance being sensed and not just mass changes at the sensor surface occurring in the sensing process; and hence it can perform simultaneous quantitative analysis of effects due to surface-stress changes together with mass-dependent effects.