| 摘要 |
PROBLEM TO BE SOLVED: To provide a downflow generating mechanism hardly generating vibration with low power consumption and also hardly generating pressure difference in a small environment. SOLUTION: This downflow generating mechanism comprises: a cleaning gas supplying mechanism 4 for supplying a cleaning gas; a cleaning gas storing space 5 to which the cleaning gas is supplied from the cleaning gas supplying mechanism 4, and of which an internal pressure is a positive pressure to a pressure inside of the small environment 3 in which a cleaning level is kept higher in comparison with a circumferential one; and a plurality of holes 8 communicating the cleaning gas storing space 5 and the inside of the small environment 3. The cleaning gas is jetted to the inside of the small environment 3 from the cleaning gas storing space 5 through the plurality of holes 8 to generate the downflow inside of the small environment 3. COPYRIGHT: (C)2009,JPO&INPIT
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