发明名称 |
APPARATUS AND METHOD FOR INSPECTING CIRCUIT STRUCTURES |
摘要 |
An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor (16), for detecting light intensity as a function of position along the sensor. A transport mechanism (12) moves a circuit structure (10), such as a PCB or a wafer relative to the sensor. The circuit structure is illuminated with an illumination system (14) that comprises a hollow cylinder (144) with a mainly diffusively and/or specularly reflecting inner wall surface. The cylinder is arranged in parallel with the sensor and has a first slit (40) and a second slit (42) located so that a virtual plane runs through the sensor, the first and second slit to a location for the circuit structure under inspection. The illumination system furthermore comprises a linear light source (146) in the cylinder or the inner wall of the cylinder. In an embodiment the illumination system comprises a splitting mirror (22) in the cylinder to reflect light to the circuit structure.
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申请公布号 |
US2009219519(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
US20070280922 |
申请日期 |
2007.02.28 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
MODDEMEYER KEES;VINK HENRI JOHANNES PETRUS;DE JAGER PIETER WILLEM HERMAN |
分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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