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发明名称
摘要
申请公布号	JP2009531831(A)	申请公布日期	2009.09.03
申请号	JP20090502884	申请日期	2007.03.23
申请人		发明人
分类号	H01J37/317;H01J37/147;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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