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发明名称
摘要
The present invention comprises the steps of forming a bump metal film (20) as a pattern
申请公布号
JP4322508(B2)
申请公布日期
2009.09.02
申请号
JP20030007461
申请日期
2003.01.15
申请人
发明人
分类号
H01L21/3205;H01L23/52;H01L21/60;H01L21/768;H01L23/12;H01L23/48;H01L25/065;H01L25/07;H01L25/18
主分类号
H01L21/3205
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