| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor preventing a projection from adhering to a fixed electrode. <P>SOLUTION: The acceleration sensor includes a sensor unit comprising weight units 4, 5 where recesses 41, 51 and full units 40, 50 are formed integrally, a pair of beam units 6a, 6b, 7a, 7b, movable electrodes 4a, 5a, and first fixed electrodes 20a, 21a and second fixed electrodes 20b, 21b. The acceleration sensor includes an upper fixed plate 2a disposed with a prescribed interval to a surface at a side opposing fixed electrodes 20a, and the like of the weight units 4, 5 and including the respective fixed electrodes 20a, and the like on one surface. Projections 43a, 53a are formed on opposing surfaces of the respective fixed electrodes 20a, and the like of the respective movable electrodes 4a, 5a, and release units 20c, and the like hollowed out so that one surface of the upper fixed plate 2a faces the outside are provided at parts opposing the projections 43a, 53a of the respective fixed electrodes 20a, and the like. <P>COPYRIGHT: (C)2011,JPO&INPIT |
