发明名称 |
Method for making a silicon based thin film solar cell |
摘要 |
According to the present invention, sufficient light trapping effect can be exhibited and series resistance can be kept small, by sequentially forming a silicon based low refractive index layer and a thin silicon based interface layer on a backside of a photoelectric conversion layer observed from a light incident side, and as a result a silicon based thin film solar cell may be provided efficiently and at low cost. |
申请公布号 |
EP1650812(B1) |
申请公布日期 |
2011.06.08 |
申请号 |
EP20040747712 |
申请日期 |
2004.07.12 |
申请人 |
KANEKA CORPORATION |
发明人 |
SAWADA, TORU;KOI, YOHEI;SASAKI, TOSHIAKI;YOSHIMI, MASASHI;GOTO, MASAHIRO;YAMAMOTO, KENJI |
分类号 |
H01L31/075;H01L31/052 |
主分类号 |
H01L31/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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