METHOD FOR MANUFACTURING 3-DIMENSIONAL STRUCTURES USING THIN FILM WITH COLUMNAR NANO PORES AND MANUFACTURE THEREOF
摘要
Disclosed is a method for manufacturing 3-dimensional structure using a thin film with a columnar nano pores and a manufacture thereof. A method for packaging an MEMS device or an NEMS device in accordance with an embodiment of the present invention includes: forming a sacrificial layer; forming a thin film having columnar nano pores formed therein by depositing one of a metallic material, an oxide, a nitride and a fluoride on the sacrificial layer; forming a support layer on the thin film and patterning the support layer; removing the sacrificial layer through use of the nano pores of the thin film parts of which are exposed by patterning the support layer; and forming a shielding layer on the thin film and the support layer.
申请公布号
WO2010140792(A2)
申请公布日期
2010.12.09
申请号
WO2010KR03396
申请日期
2010.05.28
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;YOON, JUN-BO;LEE, BYUNG-KEE;CHOI, DONG-HOON;YANG, HYUN-HO