| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of adjusting a rotation angle of a holder for holding an inspection object holding pair without stopping rotation of a first rotor.SOLUTION: When an inspection chip 1 is set on a chip holder 47, and a power source of the inspection device 30 is switched on, a shaft 36 of a main shaft motor 35 is rotated, and a driving force is transmitted to the main shaft 57 through a pulley 37, a belt 39 and a pulley 38, to rotate a turntable 33. When changing a direction of a centrifugal force applied to the inspection chip 1 is changed, a stepping motor 51 is rotated as much as prescribed rotation, and a projection 70 of a cam plate 59 is slid along a groove part 80 of a T-shaped plate 48, to thereby move vertically the T-shaped plate 48. In the state where the T-shaped plate 48 is lowered to the lowest position, the chip holder 47 is rotated by 90° counterclockwise from a vertical state into a horizontal state. |
