| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mirror having superior stability against heat and an EUV light generation device using the mirror. <P>SOLUTION: The mirror includes: a substrate 111; a heat diffusion layer 112 formed on the main surface of the substrate and having higher heat-conductivity than the substrate; and a high reflection film 113 formed on the heat diffusion layer and having lower heat-conductivity than the heat diffusion layer. By this arrangement, the heat generated in a laser beam irradiation portion is widely distributed by the heat diffusion layer 112, and as a result, the heat is efficiently discharged through the whole substrate 111. <P>COPYRIGHT: (C)2012,JPO&INPIT |
