发明名称 POSITIONING DEVICE, SUBSTRATE PROCESSING DEVICE AND REFERENCE MEMBER FIXATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a positioning device having a reference member accurately mounted at a reference position. <P>SOLUTION: The positioning device includes: the reference member to be a criterion for positioning; a support portion for supporting the reference member; and a first fixed member provided on the support portion to fix the reference member with the support portion or to cancel the fixation. The reference member is connected to the support portion in a movable state, and fixed to the support portion by the first fixed member after being positioned. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012004407(A) 申请公布日期 2012.01.05
申请号 JP20100139132 申请日期 2010.06.18
申请人 TOKYO ELECTRON LTD 发明人 AMANO YOSHIFUMI;KANEKO SATOSHI
分类号 H01L21/68 主分类号 H01L21/68
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