| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for forming a ring-like coating film by coating the peripheral edge of a circular substrate with a coating liquid while ensuring high uniformity of the width thereof. <P>SOLUTION: While rotating a substrate and supplying a coating liquid from a nozzle, the coating liquid supply position is shifted from the outside of the substrate toward the peripheral edge thereof. The coating liquid is applied in a wedge-shape having an angle of 10° or less when the substrate is viewed in the plan view. Subsequently, movement of the nozzle is stopped while continuing rotation of the substrate and supply of the coating liquid, and the coating liquid is applied in stip along the peripheral edge of the substrate. The end of the coating liquid applied in strip is then brought into contact with the wedge-shape, thus applying the coating liquid over the whole circumference of the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
