发明名称 APPARATUS FOR IMAGING A UNIFORMLY IRRADIATED ARTICLE
摘要 Provided is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. According to embodiments of the present invention, the assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.
申请公布号 KR20140046390(A) 申请公布日期 2014.04.18
申请号 KR20130120861 申请日期 2013.10.10
申请人 SEAGATE TECHNOLOGY LLC 发明人 AHNER JOACHIM WALTER;TUNG DAVID M.;WONG SAMUEL KAH HEAN;LOTT HENRY LUIS;MCLAURIN STEPHEN KEITH;NASSIROU MAISSARATH;ZAVALICHE FLORIN
分类号 G01B11/00 主分类号 G01B11/00
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