SUBSTRATE PROCESSING DEVICE, SEMICONDUCTOR EQUIPMENT, SELF-DIAGNOSIS DEVICE OF SEMICONDUCTOR EQUIPMENT, AND SELF-DIAGNOSIS METHOD OF SEMICONDUCTOR EQUIPMENT
摘要
<p>PROBLEM TO BE SOLVED: To provide a substrate processing device capable of autonomously diagnosing itself without support of an automated material handling system and another test equipment.SOLUTION: A substrate processing device 100 includes: a process unit 110 which performs a substrate processing step; a plurality of load ports 120 provided so as to load a substrate or a carrier which houses a plurality of substrates; a plurality of communication interface units 131 to 134 installed in response to the respective load ports so as to communicate with a transfer unit which transfers the substrate or the carrier; and a controller 140 which controls transfer operation of the substrate or the carrier by transmitting and receiving signals between itself and the transfer unit through the communication interface units. The controller includes a first process unit which operates the first communication interface unit 131 as a passive type and a second process unit which operates the second communication interface unit 132 as an active type.</p>
