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发明名称
インプリント用ガラス基板、レジストパターン形成方法、インプリント用ガラス基板の検査方法及び検査装置
摘要
申请公布号
JP5771256(B2)
申请公布日期
2015.08.26
申请号
JP20130206146
申请日期
2013.10.01
申请人
发明人
分类号
G01N23/203;G01N23/22;G01N23/225;H01J37/22;H01J37/29;H01L21/027
主分类号
G01N23/203
代理机构
代理人
主权项
地址
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