发明名称 VACCUM GENERATING UNIT
摘要 <p>A vacuum generating unit is disclosed. According to one aspect of an embodiment of the present invention, the vacuum generating unit comprises: a vacuum suctioning unit to suck or separate a transferred object; a vacuum generating unit to form a vacuum pressure by jetting compressed air to the outside; a pressure tank unit to store air of uniform pressure, and a first electronic valve to switch between a first state and a second state, transferring the vacuum pressure formed by the vacuum generating unit to the vacuum suctioning unit, blocking the vacuum pressure transferred to the vacuum suctioning unit in the second state, and transferring air of uniform pressure pre-stored in the pressure tank unit.</p>
申请公布号 KR20150103808(A) 申请公布日期 2015.09.14
申请号 KR20140025292 申请日期 2014.03.04
申请人 NDS CO., LTD. 发明人 NA, IK KYUN
分类号 H01L21/677;B23Q3/08 主分类号 H01L21/677
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