发明名称 APPARATUS AND PROCESS FOR PRODUCING A CRYSTAL OF SEMICONDUCTOR MATERIAL
摘要 The present invention relates to an apparatus and processor for producing a crystal of a semiconductor material. The apparatus comprises: a crucible including a crucible bottom and a crucible wall, wherein the crucible bottom has an upper surface, a rear surface, and a plurality of openings arranged between the center of the crucible wall and the crucible bottom, and there are elevations arranged on the upper surface and rear surface of the crucible bottom; and an induction heating coil disposed under the crucible, and provided to dissolve a semiconductor material and stabilize melt of the semiconductor material which covers a growth crystal of the semiconductor material. The process comprises the following steps: generating a bed of a semiconductor material feed on the upper surface of the crucible bottom; and dissolving the semiconductor material of the bed by using the induction heating coil.
申请公布号 KR20150140589(A) 申请公布日期 2015.12.16
申请号 KR20150080062 申请日期 2015.06.05
申请人 SILTRONIC AG 发明人 BRENNINGER GEORG;RAMING GEORG
分类号 H01L21/22;H01L21/67 主分类号 H01L21/22
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