发明名称 |
ACCELEROMETERS |
摘要 |
In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202). |
申请公布号 |
WO2015185937(A1) |
申请公布日期 |
2015.12.10 |
申请号 |
WO2015GB51643 |
申请日期 |
2015.06.05 |
申请人 |
ATLANTIC INERTIAL SYSTEMS LIMITED |
发明人 |
DURSTON, MICHAEL;TOWNSEND, KEVIN |
分类号 |
G01P15/125;G01P15/08;G01P15/13;G01P21/00 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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地址 |
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