发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor stacked structure including at least an electron transit layer and an electron supply layer over a substrate. The electron supply layer includes a first portion and second portions sandwiching the first portion, and the first portion has a higher energy of a conduction band than that of the second portion, and includes a doped portion doped with an n-type impurity and undoped portions that sandwich the doped portion and are not doped with an impurity.
申请公布号 US2015357420(A1) 申请公布日期 2015.12.10
申请号 US201514828995 申请日期 2015.08.18
申请人 FUJITSU LIMITED 发明人 Endoh Akira
分类号 H01L29/205;H01L29/778;H01L29/20 主分类号 H01L29/205
代理机构 代理人
主权项 1. A semiconductor device, comprising: a semiconductor stacked structure including at least an electron transit layer and an electron supply layer over a substrate; wherein the electron supply layer includes a first portion and second portions sandwiching the first portion; and the first portion has a higher energy of a conduction band than that of the second portion, and includes a doped portion doped with an n-type impurity and undoped portions that sandwich the doped portion and are not doped with an impurity.
地址 Kawasaki-shi JP