| 摘要 |
An internal power supply apparatus for low power is provided to change the size of a driver of an internal power supply apparatus by sensing an internal voltage level. An internal power supply apparatus supplies an internal voltage consumed in a semiconductor device. A voltage driver part includes a reference voltage generator for outputting a constant voltage level by receiving an external voltage, a level shifter shifting the constant voltage level to a reference target voltage level of the internal voltage, and a reference driver outputting an internal voltage reaching the reference target voltage level by supplying an external voltage if the fed back internal voltage decreases below the reference target voltage level. The voltage driver part includes a sub driver being driven to output an internal voltage reaching a sub target voltage level when the reference target voltage level decreases below the sub target voltage level lower than the reference target voltage level.
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