| 摘要 |
PROBLEM TO BE SOLVED: To measure a flow rate with high accuracy even in a work-piece of any characteristics.SOLUTION: There is provided a flow rate measurement device which sequentially supplies gas of a series of test pressures in a predetermined range including a specified pressure Pfor a reference work by adjusting an electro-pneumatic regulator, measures each flow rate at the time with a flow meter, and stores them as characteristic curves for the reference work. Gas of a test pressure Pwithin the predetermined range is supplied for a measurement target work, and a flow rate at the time is measured as a flow rate value Q. An arithmetic unit reads flow rate values Qand Qcorresponding to the specified pressure Pand the test pressure P, respectively from the characteristic curves for the reference work, and assuming that the flow rate with the specified pressure Pfor the measurement target work is a flow rate on the approximate straight line, corresponding to the test pressure Pis Q, and a flow rate with the specified pressure Pfor the measurement target work is Q, and if a proportionality of Q:Q=Q:Qis established, the flow rate value Qis appropriated and calculated from the flow rate values Q, Qand Q. |
