DUST COLLECTING MECHANISM FOR GROOVE MACHINING HEAD AND GROOVE MACHINING APPARATUS

摘要

A groove machining head has a dust collecting hood 40 having a suction port in the vicinity where tools 32 protrude from a bottom plate 33 of the groove machining head. When performing groove machining on a substrate W using the groove machining head 30, a blower 35 sucks air inside the dust collecting hood 40 through ducts 34. Doing so can suck dust produced by the groove machining through the suction port of the dust collecting hood 40 before attachment of the dust on the substrate W.

主权项

1. A dust collecting mechanism for groove machining head comprising:
a groove machining head; a dust collecting hood that attaches to a lower part of said groove machining head; and a dust collector that sucks air from said dust collecting hood through at least a duct, wherein said groove machining head has a plurality of tool holders, each of which holds a tool of which a tool edge faces downward, and said dust collecting hood is a case of which an upper surface opens; has an opening through which said tool of said groove machining head protrudes, and a frame-shaped partition set that attaches upward from said opening at a fixed distant from said tool holder; and attaches such that a tip of said tool protrudes downward through said opening.