| 摘要 |
An OLED display panel and manufacturing method of the panel are provided in which a terminal electrode is exposed by performing etching with fixed etching conditions without performing step processing. A terminal region comprised from a plurality of metal electrodes 2 conducting with an organic light emitting element of a display part is formed above a substrate 1. Next, a stacked sealing film comprised from a first SI contained inorganic layer, an organic resin layer and a second Si contained inorganic layer is formed above a surface of the display part and the terminal region 6. Next, etching is performed using etching conditions suitable for the first and the second SI contained inorganic layer while the display part is masked, the first and the second SI contained inorganic layer above the metal electrode 2 are removed and a surface of the metal electrode 2 is exposed. |
