| 摘要 |
A microvalve device and a manufacturing method therefore are disclosed. The microvalve device includes a body, including a first layer (7) and at least a second layer (8) forming a chamber (8) with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports (4, 5, 6) in fluid communication with the chamber (9); and piezoelectric actuators (1, 2, 3) corresponding to predetermined fluid ports (4, 5, 6), wherein the piezoelectric actuators (1, 2, 3) are arranged in the chamber (9) and strain extending and retracting directions of the piezoelectric actuators are parallel to the first layer (7), wherein free ends of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting directions are used for shielding the fluid ports (4, 5, 6) so as to control opening/closing states of the fluid ports (4, 5, 6). |
| 主权项 |
1. A microvalve device, comprising:
a body, at least comprising a first layer and a second layer forming a chamber with the first layer, wherein the first layer is provided with at least two fluid ports in fluid communication with the chamber; and piezoelectric actuators corresponding to predetermined fluid ports, wherein the piezoelectric actuators are arranged in the chamber and strain extending and retracting directions of the piezoelectric actuators are parallel to the first layer, wherein free ends of the piezoelectric actuators in the strain extending and retracting directions are used for shielding the fluid ports so as to control opening/closing states of the fluid ports. |
