| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a support mechanism for inspection probe that finely adjusts relative positions while an inspection probe is pressed vertically against a predetermined position of an object of inspection. <P>SOLUTION: A support mechanism for an inspection probe according to the present invention includes moving means of supporting the inspection probe for electrically inspecting the object of inspection by bringing the inspection probe into contact with a predetermined position of the object of inspection movably in a state in which the inspection probe is in contact with or apart from the predetermined position while holding the inspection probe at a right angle to a plane including the predetermined position, and support means of supporting the inspection probe finely-movably only in a direction parallel with the plane including the predetermined position while the inspection probe is brought into contact with or separated apart from the predetermined position. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
