Semiconductor devices having bit line structures disposed in trenches

摘要

Semiconductor devices are provided. The semiconductor device includes a bit line contact plug and a storage node contact plug electrically connected to an active region of a substrate. A bit line structure is disposed on the bit line contact plug to extend in a first direction. The bit line structure is disposed in a trench pattern that intrudes into a side of the storage node contact plug. Related methods and systems are also provided.

主权项

1. A semiconductor device comprising:
a bit line contact plug and a storage node contact plug electrically connected to an active region of a substrate; and a bit line structure disposed in a trench pattern on the bit line contact plug and extending in a first direction, wherein the trench pattern intrudes into a side of the storage node contact plug.