| 摘要 |
[Problem] To provide a washing method for an object to be washed and a washing apparatus for an object to be washed that make it possible to discharge a washing medium, such as a washing solution or rinsing solution, remaining inside crevices provided in a thin sheet-shaped object to be washed and that are able to preempt the occurrence of problems such as increased running cost and the occurrence of water stains, which occur as a result of washing medium being carried forward at each step, and deformation of the object being washed that can occur as a result of removing washing media. [Solution] The present invention is a washing method for an object to be washed comprising: a step (S11) for washing the object being washed using a washing solution; steps (S15, S18) for rinsing the object being washed using a rinsing solution; a step (S21) for washing the object being washed with a replacement solution; and steps (S12, S14, S16, S17, S19, S20, S22) for discharging washing media remaining inside various crevices of the object being washed by reducing the pressure of the surrounding atmosphere that communicates with the various crevices when the object being washed has been taken out of the washing medium after the step for washing the object being washed with the washing solution and before the step for washing the object being washed using the replacement solution. |
