| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device which accurately drives a stage in a desired direction during exposure.SOLUTION: In an exposure device, when exposing, positional information on a stage WST is measured by a Y head 64 and an X-head 66 which are respectively opposing to Y scales 39Y, 39Y, and X scales 39X, 39X. Movement in an X direction (or Y direction) of the stage WST is controlled while compensating a measurement error of an encoder system generated due to a displacement of the stage WST in a direction different from the X direction (or Y direction) based on measurement information on the encoder system including heads 64, 66. |
