ROLLER DEVICE USING SUCTION ROLLER, AND PRODUCTION METHOD FOR MEMBER HAVING UNEVEN STRUCTURE

摘要

A roll apparatus includes a suction roll, a suction mechanism, and a gas-permeable member. The suction roll is rotatable and has an outer circumferential surface and an inside defined by the outer circumferential surface. The suction mechanism generates a suction force toward the inside from an outside of the suction roll. The gas-permeable member covers the outer circumferential surface of the suction roll. The gas-permeable member and the suction roll allow water vapor to be uniformly extracted from an object to be processed while the object to be processed is pressed by means of the gas-permeable member. The roll apparatus of the present invention is capable of producing a member having a concave-convex structure to be used for diffracting or scattering light at a high yield and high throughput.

主权项

1. A roll apparatus, comprising:
a suction roll being rotatable and having an outer circumferential surface and an inside defined by the outer circumferential surface; a suction mechanism configured to generate a suction force toward the inside from an outside of the suction roll; and a gas-permeable member covering the outer circumference surface of the suction roll.