| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional element having a small variance of detection accuracy and high detection sensitivity, a method for manufacturing the functional element, and an electronic device, electronic equipment and a mobile body including the functional element.SOLUTION: A method for manufacturing a functional element (gyro sensor element 1) is provided: the functional element includes oscillation parts 12a, 12b for driving and oscillation parts 14a, 14b for detection, in which a drive oscillation direction of the oscillation parts 12a, 12b for driving is different from an oscillation direction of the oscillation parts 14a, 14b for detection by Coriolis force depending on an angular velocity. The method for manufacturing the functional element includes a resonance frequency adjusting step in the oscillation parts for detection, in which a resonance frequency of the oscillation parts 14a, 14b for detection in the same direction as the drive oscillation direction is adjusted. |
